Trap device and substrate processing apparatus comprising the same
US12403696B2 · kind B2 · utility
0Cited by
2References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 8, 2022 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Oct 10, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/04583
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
The present disclosure provides a substrate processing apparatus capable of stably controlling a meniscus position. The substrate processing apparatus comprises a head unit configured to discharge a medical fluid; a reservoir configured to store the medical fluid and supply the medical fluid to the head unit; a pressure control unit configured to control pressure in the reservoir; and a trap unit disposed between the reservoir and the pressure control unit and configured to trap a mist generated by the reservoir.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.