Valve module for a vacuum pumping system
US12404854B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2022 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Apr 28, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A valve module for a vacuum pumping system, comprising: a plurality of inlets for receiving a fluid; a plurality of pressure sensors, each configured to measure a fluid pressure associated with a respective inlet; a first fluid line manifold; a second fluid line manifold; a plurality of multifurcating conduits, each connecting a respective inlet to both the first and second fluid line manifolds; a plurality of valves disposed in the multifurcating conduits; and a valve controller coupled to the sensors and the valves; wherein the valve controller is configured to control, based on pressure measurements from the sensors, the valves such that a fluid flow through a multifurcating conduit is directed to either only the first fluid line manifold or only the second fluid line manifold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.