Semiconductor device for particle measurement and method for operating the semiconductor device

US12405202B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Klaus Elian · Alteglofsheim, DE
• Ludwig Heitzer · Regensburg, DE
• Fabian Merbeler · Munich, DE
• Matthias Eberl · Schweinhub, DE
• Thomas Muller · Greensburg, US
• Andreas Allmeier · Pfatter, DE
• Derek Debie · Bogen, DE
• Cyrus Ghahremani · Regensburg, DE
• Jens Pohl · San Luis Obispo, US
• Christian Irrgang · Sinzing, DE

Key dates

• Filing date: Apr 17, 2023
• Grant date: Sep 2, 2025
• Expiry date: Mar 15, 2044

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2015/0046
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The application relates to a semiconductor device for particle measurement having a cavity housing and a MEMS chip arranged inside the cavity housing. The housing includes a first opening, via which the cavity is connected to the surroundings and in which a first grating is arranged, which is capable by setting it to a first electrical potential of attracting particles from the surroundings and/or electrically charging them. The MEMS chip includes a membrane facing toward the first opening, which is capable by setting it to a second electrical potential of attracting particles. The application furthermore relates to a method for operating a semiconductor device having a cavity housing and a MEMS chip arranged inside the cavity housing.