Method for region of interest processing for reticle particle detection

US12405227B2 · kind B2 · utility

Assignee

• ASML Holding N.V. · NL

Inventors

• Peter Kochersperger · Easton, US
• Christopher Michael DOHAN · Redding, US
• Justin Kreuzer · Trumbull, US
• Michal Emanuel Pawlowski · Norwalk, US
• Aage Bendiksen · Fairfield, US
• Kirill Urievich SOBOLEV · Brookfield, US
• James H. Walsh · Newtown, US
• Roberto B. Wiener · Bethel, US
• Arun Mahadevan Venkataraman · Wilton, US

Key dates

• Filing date: Jan 21, 2021
• Grant date: Sep 2, 2025
• Expiry date: Jul 19, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/95676
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An inspection system includes a radiation source that generates a beam of radiation and irradiates a first surface of an object, defining a region of the first surface of the object. The radiation source also irradiates a second surface of the object, defining a region of the second surface, wherein the second surface is at a different depth level within the object than the first surface. The inspection system may also include a detector that defines a field of view (FOV) of the first surface including the region of the first surface, and receives radiation scattered from the region of the first surface and the region of the second surface. The inspection system may also include a processor that discards image data not received from the region of the first surface, and constructs a composite image comprising the image data from across the region of the first surface.