Apparatus for laser annealing and operating method thereof
US12405478B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Jan 21, 2022 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Sep 21, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67115
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method of operating an apparatus for laser annealing, includes reducing temporal or spatial coherency of a plurality of laser beams by beam superimposing; and reducing an electric field inner product magnitude of beams having the reduced temporal or spatial coherency by a fly eye lens array to reduce coherency, and/or by modifying a polarization state between the beams by beam superimposing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.