Susceptor including purge gas flow passage
US12406875B2 · kind B2 · utility
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1References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 11, 2024 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Dec 11, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68792
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a susceptor including a purge gas channel for supplying purge gas. The present disclosure provides a susceptor including: a plate having a heating element layer embedded therein; and a hollow shaft joined to a bottom of the plate, wherein the plate includes a purge gas channel layer disposed on a plane different from that of the heating element layer, and the purge gas channel layer includes an internal channel and multiple radial branch channels extending outward from the internal channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.