Microelectronic devices including slot structures, and related electronic systems and methods of forming the microelectronic devices
US12406886B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2022 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Aug 27, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B80/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A microelectronic device comprises a stack structure comprising alternating conductive structures and insulative structures. Memory cells vertically extend through the stack structure, and comprise a channel material vertically extending through the stack structure. An additional stack structure vertically overlies the stack structure and comprises additional conductive structures and additional insulative structures. First pillar structures extend through the additional stack structure and vertically overlie a portion of the memory cells. Second pillar structures are adjacent to the first pillar structures and extend through the additional stack structure and vertically overlie another portion of the memory cells. Slot structures are laterally adjacent to the first pillar structures and to the second pillar structures and extend through at least a portion of the additional stack structure. A distance between the first pillar structures and the slot structures is substantially equal to a distance between the second pillar structures and the slot structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.