Layered structure with deformation control layer
US12408503B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Nov 1, 2022 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Nov 1, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/815
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A layered structure comprising a substrate having a first deformation. Also one or more device layers forming a device and having a second deformation. A deformation control layer which is pseudomorphic with respect to the substrate and having a third deformation. The deformation control layer is selected such that a sum of the first, second and third deformations matches a target level of deformation. Advantageously the layered structure has a controlled, known deformation which can be compressive, tensile or zero.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.