Method and system for switching a dispensed fluid in a nanofabrication dispensing system
US12409466B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 12, 2022 |
| Grant date | Sep 9, 2025 |
| Priority date | — |
| Expiry date | Mar 20, 2044 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method of switching a first fluid supplied to a dispenser with a second fluid. The method includes stopping the first fluid from flowing into a common portion of a flow system, causing a flush fluid to flow through the common portion, stopping the flush fluid from flowing into the common portion, removing the flush fluid from the common portion, causing the second fluid to flow through the common portion, and continuously circulating the first fluid to and from a reservoir without the first liquid entering the common portion of the flow system. The continuously circulating of the first fluid begins a) after stopping the fluid liquid from flowing into the common portion of the flow system and b) prior to or during the second fluid flowing through the common portion of the flow system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.