Steven C. Shackleton
21Patents
3h-index
33Co-inventors
59Inventor score
Filing activity: Apr 7, 2005 → Dec 12, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7635263B2 | Chucking system comprising an array of fluid chambers | Performing Operations; Transporting | 26 | Active |
| US7281919B2 | System for controlling a volume of material on a mold | Emerging Cross-Sectional Technologies | 19 | Expired |
| US9227361B2 | Imprint lithography template | Physics | 8 | Active |
| US9770850B2 | Imprint apparatus and article manufacturing method | Performing Operations; Transporting | 1 | Active |
| US8033813B2 | Chucking system comprising an array of fluid chambers | Performing Operations; Transporting | 1 | Active |
| US11204549B2 | Superstrate with an offset mesa and methods of using the same | Electricity | 0 | Active |
| US10739675B2 | Systems and methods for detection of and compensation for malfunctioning droplet dispensing nozzles | Performing Operations; Transporting | 0 | Active |
| US11034057B2 | Planarization process, apparatus and method of manufacturing an article | Electricity | 0 | Active |
| US10562295B2 | Masked quartz crystal microbalance for calibrating and monitoring inkjet dispensers | Physics | 0 | Active |
| US11262651B2 | System for detecting accumulated material on a faceplate of a dispenser and method of inspecting the faceplate | Performing Operations; Transporting | 0 | Active |
| US11193506B2 | Pulsation dampener with gas retention | Physics | 0 | Active |
| US8021594B2 | Preserving filled features when vacuum wiping | Performing Operations; Transporting | 0 | Active |
| US11951660B2 | Shaping system including an evaporation cover, shaping process, and method of manufacturing an article | Performing Operations; Transporting | 0 | Active |
| US12085851B2 | Pressure sensor manifold with increased photocurable resistance | Electricity | 0 | Active |
| US11908711B2 | Planarization process, planarization system and method of manufacturing an article | Electricity | 0 | Active |
| US12195382B2 | Superstrate and a method of using the same | Chemistry; Metallurgy | 0 | Active |
| US12409466B2 | Method and system for switching a dispensed fluid in a nanofabrication dispensing system | Performing Operations; Transporting | 0 | Active |
| US12027373B2 | Planarization process, planarization system, and method of manufacturing an article | Electricity | 0 | Active |
| US10315814B2 | Transfer cap | Performing Operations; Transporting | 0 | Active |
| US12415357B2 | Method of cleaning fluid dispenser by applying suction force and vibrating meniscus | Performing Operations; Transporting | 0 | Active |
| US11387098B2 | Dispenser guard and method of manufacturing an article | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.