Automated showerhead tilt adjustment
US12410519B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 10, 2021 |
| Grant date | Sep 9, 2025 |
| Priority date | — |
| Expiry date | Jun 10, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/52
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In some examples, an automated tilting system is provided for adjusting an orientation of a component in a substrate processing chamber. The automated tilting system comprises at least one tilt adjustment motor arranged to cooperate with the component and be connected to a portion of the component by a coupling. The coupling is configured such that automated rotational motion by the at least one tilt adjustment motor imparts corresponding axial movement, relative to the at least one tilt adjustment motor or a datum structure, to the connected portion of the component to adjust the orientation of the component in the processing chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.