Flow control system, method, and apparatus

US12411502B2 · kind B2 · utility

Assignee

• ICHOR SYSTEMS, INC.

Inventors

• Daniel T. Mudd · Reno, US
• Marshall B. Grill · Reno, US
• Norman L. Batchelor, II · Sparks, US
• Sean Penley · Sparks, US
• Michael Maeder · Reno, US
• Patti J. Mudd · Reno, US
• Zachariah Ezekiel McIntyre · Houston, US
• Tyler James Wright · Reno, US
• Matthew Eric Kovacic · Reno, US
• Christopher B. Davis · San Diego, US

Key dates

• Filing date: Oct 5, 2023
• Grant date: Sep 9, 2025
• Expiry date: Oct 5, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A gas flow control system for delivering a plurality of gas flows. The gas flow control system has a gas flow path extending from a gas inlet to first and second gas outlets. First and second flow restrictors are operably coupled to the gas flow path. First and second valves are operably coupled to the gas flow path such that when both first and second valves are in a fully open state, flows of gas from the first and second gas outlets are split according to the impedances of the first and second flow restrictors.