Substrate inspection apparatus, substrate inspection method, and recording medium
US12413832B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2023 |
| Grant date | Sep 9, 2025 |
| Priority date | — |
| Expiry date | Jul 14, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30164
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substrate inspection apparatus configured to inspect a substrate with an image obtained by imaging a surface of the substrate includes a holder 31 configured to hold the substrate; a first light source unit 51 configured to emit visible light to the substrate held by the holder 31; a second light source unit 52 configured to emit infrared light to the substrate held by the holder 31; a first imaging sensor configured to capture a visible light image of the surface of the substrate by receiving first reflected light emitted from the substrate as a result of radiating the visible light; and a second imaging sensor configured to capture an infrared light image of the surface of the substrate by receiving second reflected light emitted from the substrate as a result of radiating the infrared light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.