Two-dimensional grating coupler and method of forming the same
US12422623B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2023 |
| Grant date | Sep 23, 2025 |
| Priority date | — |
| Expiry date | Apr 1, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/305
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of forming a grating coupler includes: providing an initial design layout of the grating coupler, wherein the initial design layout includes: a taper section, comprising a pair of tapers; and a grating section coupled to the taper section, the grating section having an array of gratings, wherein the gratings includes gradually changing shapes, from a top-view perspective, from a first non-convex octagonal shape of a central grating, at a center of the grating section, of one of a second non-convex octagonal shape, a convex octagonal shape, and a quadrilateral shape, to an edge grating near an edge of the grating section. The method further includes: converting the initial design layout into a revised design layout through an optical proximity correction operation; and manufacturing the grating coupler using the revised design layout.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.