Patent · US Active

Multi-beam digital scan and image acquisition

US12431324B2 · kind B2 · utility

0Cited by

90References

22Claims

0Family size

Assignee

Carl Zeiss MultiSEM GmbH · DE

Inventors

Nicolas Kaufmann · Aalen, DE
Andreas Adolf · Aalen, DE
Volker Wieczorek · Neu-Ulm, DE
Nico Kaemmer · Königsbronn, DE
Christof Riedesel · Oberkochen, DE
Stefan Schubert · Oberkochen, DE

Key dates

Filing date	Jul 19, 2022
Grant date	Sep 30, 2025
Priority date	—
Expiry date	Sep 21, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2803
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A multi-beam charged particle microscope and a method of operating a multi-beam charged particle microscope for wafer inspection with high throughput and with high resolution and high reliability are provided. The method of operation and the multi-beam charged particle beam microscope comprises a mechanism for a synchronized scanning operation and image acquisition by a plurality of charged particle beamlets according a selected scan program, wherein the selected scan program can be selected according an inspection task from different scan programs.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.