Patent · US Active

Cooling approaches for stitched dies

US12432897B2 · kind B2 · utility

0Cited by
0References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 23, 2021
Grant dateSep 30, 2025
Priority date
Expiry dateJan 30, 2044

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L24/18
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Stitched dies having a cooling structure are described. For example, an integrated circuit structure includes a first die including a first device layer and a first plurality of metallization layers over the first device layer. The integrated circuit structure also includes a second die including a second device layer and a second plurality of metallization layers over the second device layer, the second die separated from the second die by a scribe region. A common conductive interconnection is coupling the first die and the second die at a first side of the first and second dies. A plurality of microfluidic channels is coupled to the first side of the first and second dies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.