Micro-circuit test apparatus
US3939414A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 28, 1974 |
| Grant date | Feb 17, 1976 |
| Priority date | — |
| Expiry date | Jan 28, 1994 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07342
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Testing of integrated circuit components of the silicon wafer type is accomplished by a test probe assembly mounted on a support table, the latter being spaced vertically with respect to a platform on which the circuit components are placed. The test probe assembly, which includes a probe test unit, is mounted on the support in such a fashion that the test probe may be moved to a precise predetermined position corresponding to the precise location of that portion of the integrated circuit to be tested. This is accomplished by mounting the assembly housing such that it moves arcuately with respect to its support structure, while providing a slide unit within the housing which is movable vertically as well as axially with respect to the housing. Once the proper predetermined position has been determined and the test probe assembly adjusted such that the probe is properly aligned with the particular portion of the integrated circuit to be tested, the entire assembly is maintained in proper position. Thereafter, by computer control, the platform supporting the integrated circuits to be tested is indexed in accordance with the predetermined program and each of the particular circuits of…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.