Fluid bearing apparatus and method utilizing selective turntable diverter structure
US3948564A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 19, 1975 |
| Grant date | Apr 6, 1976 |
| Priority date | — |
| Expiry date | May 19, 1995 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G51/03
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Apparatus and method for handling articles, such as silicon and like wafers used in producing electronic devices. Articles are transferred between two predetermined stations on a fluid bearing track structure and may be selectively diverted in sequence into a storage magazine which defines a buffer station so that articles to be handled or treated in adjacent associated apparatus may be maintained in readily available supply to satisfy the needs of the associated apparatus. When such needs may be satisfied by direct transfer of articles into the associated apparatus the storage buffer zone is bypassed. A selectively actuated fluid bearing turntable directs articles into or from the storage magazine as operating conditions require. All handling of articles is automatically effected on fluid bearings and requires no direct manual participation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.