GCA Corporation
40Patents
0Active
40Granted
37Portfolio score
Filing activity: Sep 23, 1974 → Nov 29, 1985
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4603466A | Wafer chuck | Emerging Cross-Sectional Technologies | 89 | Expired |
| US3946200A | Proportional temperature controller | Physics | 79 | Expired |
| US4616908A | Microlithographic system | Physics | 64 | Expired |
| US4425508A | Electron beam lithographic apparatus | Emerging Cross-Sectional Technologies | 57 | Expired |
| US3973665A | Article delivery and transport apparatus for evacuated processing equipment | Emerging Cross-Sectional Technologies | 51 | Expired |
| US4518848A | Apparatus for baking resist on semiconductor wafers | Physics | 50 | Expired |
| US4401131A | Apparatus for cleaning semiconductor wafers | Emerging Cross-Sectional Technologies | 50 | Expired |
| US4567361A | Reticle bar code and method and apparatus for reading same | Electricity | 42 | Expired |
| US4647172A | Resist development method | Emerging Cross-Sectional Technologies | 37 | Expired |
| US4315705A | Apparatus for handling and treating wafers | Electricity | 37 | Expired |
| US4667415A | Microlithographic reticle positioning system | Performing Operations; Transporting | 35 | Expired |
| US4278366A | Automatic wafer processing system and method | Chemistry; Metallurgy | 28 | Expired |
| US4640619A | Microlithographic calibration scheme | Physics | 24 | Expired |
| US4436985A | Apparatus for heat treating semiconductor wafers | Chemistry; Metallurgy | 23 | Expired |
| US4206494A | High throughput illuminator | Mechanical Engineering; Lighting; Heating | 23 | Expired |
| US4496423A | Gas feed for reactive ion etch system | Emerging Cross-Sectional Technologies | 20 | Expired |
| US4517430A | Microwave heating device with constant temperature control of the magnetron | Electricity | 15 | Expired |
| US4436424A | Interferometer using transverse deviation of test beam | Physics | 15 | Expired |
| US4519717A | On-stream cloud point analyzer | Physics | 15 | Expired |
| US4325077A | Automatic wafer alignment system | Physics | 14 | Expired |
| US4402607A | Automatic detector for microscopic dust on large-area, optically unpolished surfaces | Physics | 14 | Expired |
| US4528635A | Automatic distillation apparatus | Performing Operations; Transporting | 14 | Expired |
| US4139333A | Positive displacement flow through fluid pump | Mechanical Engineering; Lighting; Heating | 12 | Expired |
| US3948564A | Fluid bearing apparatus and method utilizing selective turntable diverter structure | Performing Operations; Transporting | 11 | Expired |
| US4323763A | Parametric power controller | Physics | 10 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.