Piezoresistor effects in semiconductor resistors
US3965453A · kind A · utility
17Cited by
5References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1974 |
| Grant date | Jun 22, 1976 |
| Priority date | — |
| Expiry date | Dec 27, 1994 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D99/00
Abstract
In semiconductor integrated circuits, piezoresistance is recognized as a factor affecting production yield and circuit performance. Current flow in a circuit resistor is aligned with one of the <100> family of equivalent directions. When current is flowing along such a direction the change in resistance due to any combination of stress components is at a minimum. Additionally, variation of resistance due to stress and strain may be reduced by an increase of the total impurity concentration in a resistor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.