Article delivery and transport apparatus for evacuated processing equipment
US3973665A · kind A · utility
51Cited by
11References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 7, 1975 |
| Grant date | Aug 10, 1976 |
| Priority date | — |
| Expiry date | Mar 7, 1995 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Equipment for processing workpieces on a continuous basis under vacuum transfers workpieces from a feed compartment to an evacuated processing compartment, and removes processed workpieces to a discharge compartment, with a single reciprocating carriage and with lifters that selectively raise workpieces from the carriage and deposit them again. The carriage passes between the processing compartment and the terminal compartments through vacuum valves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.