Method and apparatus for controlling brightness and alignment of a beam of charged particles
US4000440A · kind A · utility
8Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 26, 1974 |
| Grant date | Dec 28, 1976 |
| Priority date | — |
| Expiry date | Jul 26, 1994 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/304
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A beam of charged particles has its alignment and brightness alternately controlled in accordance with the current of the beam. The measurements of the current and any corrections for alignment or brightness are made when the beam is not applied to a target.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.