Apparatus for displaying image produced by electrically charged particle beam
US4004149A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 1975 |
| Grant date | Jan 18, 1977 |
| Priority date | — |
| Expiry date | Apr 18, 1995 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A beam of electrically charged particles for illuminating a specimen is deflected by a deflection means so that the specimen is scanned with the beam bi-dimensionally. The information signal thus produced by the specimen is detected by a detector means and fed to a display apparatus incorporating therein another deflection means. The information signal is deflected by the latter deflection means to scan the display screen and is displayed thereon as an information image. A wave form of a signal produced in the latter deflection means is detected by a wave form detector means, the output of which is applied to the first mentioned deflection means to thereby deflect the electrically charged particle beam with a signal having a wave form similar to the detected one.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.