Inventor · Machida, JP

Seishiro Sato

10Patents
7h-index
12Co-inventors
59Inventor score

Filing activity: Apr 18, 1975 → Feb 8, 1993

Most-cited inventions

PatentTitleAreaCited byStatus
US4950870A Heat-treating apparatus Physics 53 Expired
US4938691A Heat-treating apparatus Chemistry; Metallurgy 31 Expired
USD349888S Controller for semi-conductor processing machine General 25 Expired
US4955775A Semiconductor wafer treating apparatus Emerging Cross-Sectional Technologies 21 Expired
USD352911S Processing machine for electron beam lithography system General 20 Expired
US4943235A Heat-treating apparatus Mechanical Engineering; Lighting; Heating 15 Expired
US4472622A Apparatus for thermal treatment of semiconductors Chemistry; Metallurgy 8 Expired
USD326273S Heat insulating cylinder for thermal treatment of semiconductor wafers General 5 Expired
US4004149A Apparatus for displaying image produced by electrically charged particle beam Electricity 3 Expired
USD327078S Instrument for transferring boats for thermal treatment of semiconductor wafers General 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.