Vacuum monitoring
US4008619A · kind A · utility
233Cited by
5References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 17, 1975 |
| Grant date | Feb 22, 1977 |
| Priority date | — |
| Expiry date | Nov 17, 1995 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Monitoring of gas contamination and of related deviations in pressures within a sealed cavity is effected by way of electrical-network responses to conduction characteristics of a thin-film deposit of getter material within the cavity, the getter film being deposited upon inert insulation between conductive contacts externally connected into an electrical circuit which controls related output signalling in accordance with conductance changes caused by getter material reactions with gas within the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.