Patent · US Expired

Semiconductor device and a method for fabricating the same

US4021835A · kind A · utility

143Cited by
3References
2Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 27, 1975
Grant dateMay 3, 1977
Priority date
Expiry dateJan 27, 1995

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/637
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A MOS-FET (Metal-Oxide-Semiconductor Field Effect Transistor) comprises a semiconductor body, source and drain regions disposed in the body at portions separated from each other, a second semiconductor region having a higher impurity concentration than that of the body, formed by ion implantation in the body between the source and drain regions, a first semiconductor region having a lower impurity concentration than that of the second semiconductor region but a higher impurity concentration than that of the body, and having an opposite conductivity type to that of the second semiconductor region, formed by ion implantation, so that the second semiconductor region is very thin, and which has a very small amount of a minute current, that is a tailing current.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.