Interchangeable specimen trays and apparatus for a vacuum type testing system
US4033904A · kind A · utility
5Cited by
8References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 24, 1975 |
| Grant date | Jul 5, 1977 |
| Priority date | — |
| Expiry date | Dec 24, 1995 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K5/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The vacuum chamber for an Auger analyzer is provided with a side access port through which interchangeable specimen trays are inserted and installed on a rotatable support structure. The specimen tray has a plurality of peripheral specimen sites and a Faraday cup probe structure similarly positioned but affixed to the support structure. The Faraday cup facilitates calibrating the ion beam and positioning the ion beam and the cup at the focal point of the electron beam. The support structure is subsequently rotated to sequentially expose each specimen to the beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.