Scanning auger microprobe with variable axial aperture
US4048498A · kind A · utility
26Cited by
5References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 1, 1976 |
| Grant date | Sep 13, 1977 |
| Priority date | — |
| Expiry date | Sep 1, 1996 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/09
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning Auger microprobe in a cylindrical mirror analyzer is provided wherein an aperture plate at the exit stage is controllably variable in aperture size and is positioned near the second order focus point and at the minimum trace of the analyzer. Control of the aperture size is provided in both an infinitely variable arrangement and in a three size exit aperture arrangement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.