Apparatus for doping a semiconductor crystalline rod

US4048508A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Joachim Martin
• Ernst Haas · Buckenhof, DE
• Manfred Schnoeller · Unterschleißheim, DE

Key dates

• Filing date: Aug 11, 1975
• Grant date: Sep 13, 1977
• Expiry date: Aug 11, 1995

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K5/08
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

An apparatus for doping a semiconductor crystalline rod by nuclear or radiogenic reactions comprised of a hollow irradiation housing having axially and rotatably movable rod support means within the chamber thereof and a neutron conductive sleeve connected with the housing and providing communication between a neutron source and the housing chamber. Accurate and controlled doping of a semiconductor crystalline rod mounted on the rod support means within the housing chamber occurs via controlled rod movement in relation to the neutron source.