Apparatus for transferring semiconductor wafers
US4069009A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 8, 1976 |
| Grant date | Jan 17, 1978 |
| Priority date | — |
| Expiry date | Oct 8, 1996 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6773
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for automatically transferring semiconductor wafers is disclosed. Semiconductor wafers are loaded on a boat which is placed on a pair of first supporting bars. A pair of second supporting bars are driven by a motor to repeat circular motion between the first supporting bars. The second supporting bars, circularly moving in parallel with the first supporting bars, forwardly transfer the boat. The boat is kept uplifted over the first supporting bars during the forward transfer thereof. Repetition of the circular motion of the second supporting bars makes the automatic transfer of the semiconductor wafers to be heat-treated in a semiconductor manufacturing system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.