Katsuo Aoki
5Patents
5h-index
10Co-inventors
56Inventor score
Filing activity: Aug 16, 1976 → Jan 9, 1987
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4096822A | Gaseous atmosphere control apparatus for a semiconductor manufacturing system | Chemistry; Metallurgy | 31 | Expired |
| US4075972A | Apparatus for thermal diffusion of semiconductor devices | Emerging Cross-Sectional Technologies | 12 | Expired |
| US4789494A | Hydrothermal process for producing magnetoplumbitic ferrite | Chemistry; Metallurgy | 9 | Expired |
| US4147432A | Apparatus for thermal diffusion by high frequency induction heating of semiconductor substrates | Chemistry; Metallurgy | 8 | Expired |
| US4069009A | Apparatus for transferring semiconductor wafers | Electricity | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.