Inventor

Katsuo Aoki

5Patents
5h-index
10Co-inventors
56Inventor score

Filing activity: Aug 16, 1976 → Jan 9, 1987

Most-cited inventions

PatentTitleAreaCited byStatus
US4096822A Gaseous atmosphere control apparatus for a semiconductor manufacturing system Chemistry; Metallurgy 31 Expired
US4075972A Apparatus for thermal diffusion of semiconductor devices Emerging Cross-Sectional Technologies 12 Expired
US4789494A Hydrothermal process for producing magnetoplumbitic ferrite Chemistry; Metallurgy 9 Expired
US4147432A Apparatus for thermal diffusion by high frequency induction heating of semiconductor substrates Chemistry; Metallurgy 8 Expired
US4069009A Apparatus for transferring semiconductor wafers Electricity 8 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.