Positive displacement flow through fluid pump
US4139333A · kind A · utility
12Cited by
8References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 18, 1977 |
| Grant date | Feb 13, 1979 |
| Priority date | — |
| Expiry date | May 18, 1997 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B43/0072
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A positive displacement flow through fluid pump especially useful for dispensing exact volumes of photoresist on a silicon wafer uses a bellows for the main pumping component. The bellows is capped at both ends and they include slugs which extend into the interior of the bellows to minimize the static volume. In addition, internal porting is provided in the slugs to effectively wash or purge the convolutions of the bellows which results in continuous cleaning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.