Cassette unit and fixture for loading the unit with a planar member
US4159799A · kind A · utility
1Cited by
6References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 1977 |
| Grant date | Jul 3, 1979 |
| Priority date | — |
| Expiry date | Dec 14, 1997 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/707
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In fabricating very-high-resolution devices with a lithographic tool such as an EBES machine, it is crucial that the planar mask or wafer members utilized therein be loaded into and maintained in the work chamber of the machine in a way that minimally affects their planarity. In accordance with the present invention this is accomplished by loading each member into a three-point-suspension cassette unit by means of a fixture that performs the loading in a precise and essentially stress-free manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.