David Alles
17Patents
9h-index
30Co-inventors
72Inventor score
Filing activity: Dec 14, 1977 → Apr 11, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6529621B1 | Mechanisms for making and inspecting reticles | Physics | 78 | Expired |
| US7123356B1 | Methods and systems for inspecting reticles using aerial imaging and die-to-database detection | Physics | 75 | Expired |
| US7379175B1 | Methods and systems for reticle inspection and defect review using aerial imaging | Physics | 60 | Expired |
| US7027143B1 | Methods and systems for inspecting reticles using aerial imaging at off-stepper wavelengths | Physics | 59 | Expired |
| US6748103B2 | Mechanisms for making and inspecting reticles | Physics | 41 | Expired |
| US7738093B2 | Methods for detecting and classifying defects on a reticle | Physics | 35 | Active |
| US6516085B1 | Apparatus and methods for collecting global data during a reticle inspection | Physics | 21 | Expired |
| US7046352B1 | Surface inspection system and method using summed light analysis of an inspection surface | Physics | 10 | Expired |
| US6654489B2 | Apparatus and methods for collecting global data during a reticle inspection | Physics | 10 | Expired |
| US4163155A | Defining a low-density pattern in a photoresist with an electron beam exposure system | Electricity | 8 | Expired |
| US7835015B1 | Auto focus system for reticle inspection | Physics | 6 | Active |
| US7926959B1 | Beam conditioning to reduce spatial coherence | Physics | 1 | Active |
| US9348214B2 | Spectral purity filter and light monitor for an EUV reticle inspection system | Physics | 1 | Active |
| US4159799A | Cassette unit and fixture for loading the unit with a planar member | Physics | 1 | Expired |
| US8772731B2 | Apparatus and method for synchronizing sample stage motion with a time delay integration charge-couple device in a semiconductor inspection tool | Physics | 1 | Active |
| US9619878B2 | Inspecting high-resolution photolithography masks | Physics | 0 | Active |
| US8928895B2 | Auto focus system for reticle inspection | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.