Method for the contactless measurement of the potential waveform in an electronic component and arrangement for implementing the method

US4220853A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Hans-Peter Feuerbaum · Hersbruck, DE
• Eckhard Wolfgang · Munich, DE

Key dates

• Filing date: Mar 21, 1979
• Grant date: Sep 2, 1980
• Expiry date: Mar 21, 1999

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/305
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for the contactless measurement of the potential waveform in an electronic component with a scanning electron microscope in which the electron beam is aimed at a measuring point of the integrated circuit until at least one phase range of the measuring voltage is determined by phase-shifting the pulses of the primary electron beam with respect to the measuring voltage and subsequently, the electron beam jumped to at least one further measuring point where a phase range is determined in the same manner permitting measurement of the potential waveform at different points of the integrated circuit and displayed together on a picture screen.