Inventor · Hersbruck, DE

Hans-Peter Feuerbaum

43Patents
17h-index
28Co-inventors
81Inventor score

Filing activity: Aug 10, 1978 → Apr 3, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US7045781B2 Charged particle beam apparatus and method for operating the same Electricity 179 Expired
US7274018B2 Charged particle beam apparatus and method for operating the same Electricity 160 Expired
US6943349B2 Multi beam charged particle device Electricity 89 Expired
US4831266A Detector objective for particle beam apparatus Electricity 43 Expired
US4277679A Apparatus and method for contact-free potential measurements of an electronic composition Electricity 33 Expired
US4713543A Scanning particle microscope Electricity 28 Expired
US5422486A Scanning electron beam device Electricity 28 Expired
US4220854A Method for the contactless measurement of the potential waveform in an electronic component and apparatus for implementing the method Physics 27 Expired
US4296372A Techniques for impressing a voltage with an electron beam Physics 27 Expired
US4812651A Spectrometer objective for particle beam measuring instruments Electricity 26 Expired
US4220853A Method for the contactless measurement of the potential waveform in an electronic component and arrangement for implementing the method Physics 25 Expired
US6730907B1 Charged particle device Electricity 22 Expired
US5780859A Electrostatic-magnetic lens arrangement Electricity 20 Expired
US4413181A Arrangement for stroboscopic potential measurements with an electron beam testing device Electricity 20 Expired
US4223220A Method for electronically imaging the potential distribution in an electronic component and arrangement for implementing the method Physics 19 Expired
US5834773A Method and apparatus for testing the function of microstructure elements Physics 19 Expired
US6555815B2 Apparatus and method for examining specimen with a charged particle beam Electricity 19 Expired
US4241259A Scanning electron microscope Electricity 17 Expired
US4292519A Device for contact-free potential measurements Electricity 17 Expired
US8203119B2 Charged particle beam device with retarding field analyzer Electricity 17 Active
US6936817B2 Optical column for charged particle beam device Electricity 15 Expired
US5329125A Device for corpuscular-optical examination and/or processing of material samples Electricity 15 Expired
US4169229A Apparatus for keying in electron beams Electricity 14 Expired
US4460866A Method for measuring resistances and capacitances of electronic components Physics 14 Expired
US5041724A Method of operating an electron beam measuring device Electricity 13 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.