Method for the contactless measurement of the potential waveform in an electronic component and apparatus for implementing the method
US4220854A · kind A · utility
27Cited by
4References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 21, 1979 |
| Grant date | Sep 2, 1980 |
| Priority date | — |
| Expiry date | Mar 21, 1999 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R13/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring the potential waveform in an electronic component by means of a scanning electron beam in which the pulse sequence of the primary electron beam contains alternatingly a pulse sequence with a fixed reference phase with respect to the potential pattern of the measuring voltage, and a pulse sequence with a measuring phase which can be shifted over a phase range, with the potential difference between the reference phase and the measuring phases measured, permitting the contactless measurement and a display of the potential pattern on a picture screen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.