Media compatible pressure transducer
US4222277A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 1979 |
| Grant date | Sep 16, 1980 |
| Priority date | — |
| Expiry date | Aug 13, 1999 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L15/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is disclosed an absolute pressure transducer which is adaptable for use in various deleterious mediums. A single wafer contains a gage sensor configuration on one portion and an absolute sensor configuration on another adjacent portion. An active diaphragm area is defined for each sensor configuration by forming a depression beneath the sensor locations. A base member is bonded or secured to the wafer at the side containing the depressions. An aperture is directed through the base member to communicate with the depression associated with the gage sensor configuration and is employed as an external pressure port. The top surface of the wafer which contains the sensors is exposed to a relatively clean source of pressure to thereby enable the absolute sensor section to monitor this pressure, while the gage sensor section responds to both pressures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.