Method for electronically imaging the potential distribution in an electronic component and arrangement for implementing the method
US4223220A · kind A · utility
19Cited by
4References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 21, 1979 |
| Grant date | Sep 16, 1980 |
| Priority date | — |
| Expiry date | Mar 21, 1999 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R13/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for electronically imaging the potential distribution in an electronic component such as an integrated circuit in which the phase of the pulses of the primary electron beam is shifted by a time delay with respect to the potential distribution in the component with a multiple of the frequency of the line deflection of the primary electron beam on the component and a frequency synchronous therewith chosen as the frequency of the time delay.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.