Patent · US Expired

Scanning electron microscope

US4241259A · kind A · utility

17Cited by

5References

2Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Hans-Peter Feuerbaum · Hersbruck, DE
Johann Otto · Munich, DE

Key dates

Filing date	Apr 16, 1979
Grant date	Dec 23, 1980
Priority date	—
Expiry date	Apr 16, 1999

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/18
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A scanning electron microscope with an electron optical column and a sample chamber for a test sample disposed therein in a vacuum, in which the sample holder forms, directly or indirectly, an hermetic seal for the sample chamber. The electron-optical column is preferably suspended underneath the sample chamber, and the sample holder or its base form a cover for the sample chamber permitting simple and troublefree contact with the sample. Use of the electron microscope for the testing of integrated circuits is disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.