Device for contact-free potential measurements
US4292519A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 29, 1979 |
| Grant date | Sep 29, 1981 |
| Priority date | — |
| Expiry date | Nov 29, 1999 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/266
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to a device for contact free potential measurements of integrated circuits by means of measuring the energy of the secondary electrons released at the measuring location. One collector electrode 16 and one opposing field electrode 18 are arranged in succession at a predetermined distance from the measuring point with the electrodes 16 and 18 being formed as grid electrodes and arranged parallel to the flat surface of the circuit being tested. The secondary electrons are intercepted by a scintillator where their energy can be measured and the device makes it possible to have contact free potential measurements on paths of integrated circuit wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.