Secondary emission mass spectrometer mechanism to be used with other instrumentation
US4296323A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 10, 1980 |
| Grant date | Oct 20, 1981 |
| Priority date | — |
| Expiry date | Mar 10, 2000 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D59/44
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
There is disclosed a secondary ion mass spectrometer to be used with other spectro analysis mechanisms where the sample holder is fixed in a main vacuum chamber having a secondary vacuum chamber communicating with the main chamber with a vacuum seal between the two in which a substantially 90.degree. spherical segment energy analyzer is disposed in the second vacuum chamber along with a quadrupole mass spectrometer and electron multiplier. A primary ion gun is disposed within the main vacuum chamber directing an ion beam at the samples to be tested and the secondary ions emitted are collected through a longitudinal extraction lens mechanism disposed between the 90.degree. spherical segment energy analyzer and the sample to be tested in which the longitudinal extraction lens mechanism is connected to a linear movement device to focus and withdraw the extraction lens with respect to the sample to be tested and a plurality of blanking plates are disposed within the longitudinal extraction lens mechanism for deflecting certain of the secondary ions which are emitted from outside a selected area of the sample to be tested and the blanking plates are controlled through an electronic swit…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.