Method for preventing corrosion of Al and Al alloys
US4308089A · kind A · utility
21Cited by
1References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 9, 1980 |
| Grant date | Dec 29, 1981 |
| Priority date | — |
| Expiry date | May 9, 2000 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/321
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a method for preventing corrosion of Al and Al alloys processed by the dry-etching method, which comprises (i) the step of sputtering Al or Al alloy in an ammonia-containing atmosphere and (ii) the step of washing the sputtered Al or Al alloy with an alkaline aqueous solution and then with water after termination of the step (i). According to this method, corrosion of Al or Al alloy by halogen element-containing substances stuck to Al or Al alloy during the dry-etching treatment can be effectively prevented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.