Fluidized bed silicon deposition from silane

US4314525A · kind A · utility

Assignee

• CALIFORNIA INSTITUTE OF TECHNOLOGY · US

Inventors

• George Hsu · San Jose, US
• Harry Levin · Burbank, US
• Richard Hogle · Oceanside, US
• Ananda Praturi · Monrovia, US
• Ralph Lutwack · Burbank, US

Key dates

• Filing date: Mar 3, 1980
• Grant date: Feb 9, 1982
• Expiry date: Mar 3, 2000

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C01B33/03
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A process and apparatus for thermally decomposing silicon containing gas for deposition on fluidized nucleating silicon seed particles is disclosed. Silicon seed particles are produced in a secondary fluidized reactor by thermal decomposition of a silicon containing gas. The thermally produced silicon seed particles are then introduced into a primary fluidized bed reactor to form a fluidized bed. Silicon containing gas is introduced into the primary reactor where it is thermally decomposed and deposited on the fluidized silicon seed particles. Silicon seed particles having the desired amount of thermally decomposed silicon product thereon are removed from the primary fluidized reactor as ultra pure silicon product. An apparatus for carrying out this process is also disclosed.