Richard Hogle
9Patents
6h-index
28Co-inventors
63Inventor score
Filing activity: Mar 3, 1980 → Apr 21, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6818566B2 | Thermal activation of fluorine for use in a semiconductor chamber | Performing Operations; Transporting | 263 | Expired |
| US4314525A | Fluidized bed silicon deposition from silane | Chemistry; Metallurgy | 44 | Expired |
| US6955707B2 | Method of recycling fluorine using an adsorption purification process | Emerging Cross-Sectional Technologies | 24 | Expired |
| US4444811A | Fluidized bed silicon deposition from silane | Chemistry; Metallurgy | 23 | Expired |
| US5485736A | Seamless cylinder shell construction | Emerging Cross-Sectional Technologies | 9 | Expired |
| US7514119B2 | Method and apparatus for using solution based precursors for atomic layer deposition | Emerging Cross-Sectional Technologies | 9 | Active |
| US6936537B2 | Methods for forming low-k dielectric films | Electricity | 5 | Expired |
| US6361020B1 | Valve for use with high purity gas | Mechanical Engineering; Lighting; Heating | 0 | Expired |
| US7638106B2 | Method of treating a gas stream | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.