Method of photographing electron microscope images on a single photographic plate and apparatus therefor
US4316087A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 1979 |
| Grant date | Feb 16, 1982 |
| Priority date | — |
| Expiry date | Oct 30, 1999 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/04
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention relates to a method and apparatus for obtaining a single photograph of electron microscope images, with low gain in magnification, of relatively thick specimen, which photograph is suitable for direct comparison with a corresponding photograph of the same specimen obtained with an optical microscope: wherein either the specimen or the electron beam is so manipulated that the electron beam passes discretely and stepwisely through sequential portions of the specimen, and prior to impinging on the photographic plate the electron beam is screened to eliminate any portion thereof which would produce aberrations or other distortion and is controllably directed to impinge on a portion of the photographic plate which corresponds to the portion of the specimen through which the beam is passing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.