Method of making strain sensor in fragile web
US4318936A · kind A · utility
4Cited by
9References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 1981 |
| Grant date | Mar 9, 1982 |
| Priority date | — |
| Expiry date | Jan 23, 2001 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/977
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of making a strain gauge in a fragile web wherein the improvement resides in making the web after the gauge is substantially completely formed. This reverse sequence is made possible by a unique combination of plasma deposited silicon oxide and plasma deposited silicon nitride on top of the completed device to protect it from attack during silicon substrate etching to form the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.