Infrared charge transfer device (CTD) system

US4360732A · kind A · utility

Assignee

• TEXAS INSTRUMENTS INCORPORATED · US

Inventors

• Richard A. Chapman · Dallas, US
• Adam J. Lewis · Richardson, US
• Jaroslav Hynecek · Allen, US
• Michael A. Kinch · Dallas, US

Key dates

• Filing date: Jun 16, 1980
• Grant date: Nov 23, 1982
• Expiry date: Jun 16, 2000

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F39/157

Abstract

An infrared charge transfer device (CTD) imaging system is disclosed which includes an optic system for focusing infrared energy emanating from a scene, a detector matrix for receiving the focused infrared energy and converting it to electrical signals representative of the intensity of the infrared energy, and a video processor for processing the electrical signals into video signals. The detector matrix of the system is a plurality of IR detector cells arranged in rows and columns. Each detector cell includes a substrate of semiconductor material, an integrating electrode, a drain electrode, a transfer electrode and insulating layers. The integrating electrode is centrally disposed with respect to the drain and transfer electrodes with the integrating electrode in a spaced relationship with the drain electrode. The integrating and drain electrodes form first level MIS electrodes on the semiconductor substrate. The transfer gate forms a second level MIS electrode as to the semiconductor substrate and overlaps the space between the integrating and drain electrodes. In a second MIS embodiment the drain electrode is replaced by a diode formed in the semiconductor substrate. In both e…