Wafer orientation system
US4376482A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 19, 1981 |
| Grant date | Mar 15, 1983 |
| Priority date | — |
| Expiry date | May 19, 2001 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G47/244
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A wafer orienting apparatus having inwardly biased rollers, spaced about the circumferential edge of a wafer in contact with the edge. Two of the rollers are spaced apart a distance less than the dimension of a primary flat registration edge and are mounted to follow the wafer edge upon rotation of the wafer. When a flat registration edge passes these closely spaced rollers they move inwardly, activating switches associated with a coincidence circuit. When both switches are simultaneously activated, the coincidence circuit produces a signal which stops wafer rotation, thereby orienting the wafer. The rollers are mounted so that they can be moved from the path of wafer travel after wafer orientation, permitting a queue of wafers to be oriented, one after the other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.