Tencor Instruments
🏢 View company profile →50Patents
0Active
50Granted
40Portfolio score
Filing activity: Sep 9, 1977 → Jun 6, 1995
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5608526A | Focused beam spectroscopic ellipsometry method and system | Physics | 507 | Expired |
| US4844617A | Confocal measuring microscope with automatic focusing | Physics | 333 | Expired |
| US4898471A | Particle detection on patterned wafers and the like | Physics | 173 | Expired |
| US5189481A | Particle detector for rough surfaces | Physics | 171 | Expired |
| US5264912A | Speckle reduction track filter apparatus for optical inspection of patterned substrates | Physics | 144 | Expired |
| US4378159A | Scanning contaminant and defect detector | Physics | 143 | Expired |
| US5633747A | Variable spot-size scanning apparatus | Physics | 133 | Expired |
| US5416594A | Surface scanner with thin film gauge | Physics | 125 | Expired |
| US5581350A | Method and system for calibrating an ellipsometer | Physics | 115 | Expired |
| US5355212A | Process for inspecting patterned wafers | Physics | 114 | Expired |
| US5076692A | Particle detection on a patterned or bare wafer surface | Physics | 113 | Expired |
| US4899055A | Thin film thickness measuring method | Physics | 111 | Expired |
| US4766324A | Particle detection method including comparison between sequential scans | Physics | 100 | Expired |
| US4601576A | Light collector for optical contaminant and flaw detector | Physics | 93 | Expired |
| US4641967A | Particle position correlator and correlation method for a surface scanner | Physics | 75 | Expired |
| US5604585A | Particle detection system employing a subsystem for collecting scattered light from the particles | Physics | 62 | Expired |
| US5023424A | Shock wave particle removal method and apparatus | Performing Operations; Transporting | 57 | Expired |
| US5576831A | Wafer alignment sensor | Electricity | 51 | Expired |
| US5168386A | Flat field telecentric scanner | Physics | 51 | Expired |
| US4752898A | Edge finding in wafers | Emerging Cross-Sectional Technologies | 45 | Expired |
| US4302721A | Non-contacting resistivity instrument with structurally related conductance and distance measuring transducers | Emerging Cross-Sectional Technologies | 44 | Expired |
| US5241366A | Thin film thickness monitor | Physics | 43 | Expired |
| US5530550A | Optical wafer positioning system | Physics | 42 | Expired |
| US5565979A | Surface scanning apparatus and method using crossed-cylinder optical elements | Physics | 41 | Expired |
| US4597665A | Dual collector optical flaw detector | Physics | 41 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.